Advanced Materials 2002

Advanced Materials 2002

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UHV-HDE CL detection system Figure 1 shows a schematic diagram of (a) the present UHV-HDE CL detection system ... The system consists of six main parts: a main chamber, a vacuum system, a load lock system, an electron beam source, anbsp;...

Title:Advanced Materials 2002
Author: H. Kanda
Publisher: - 2002

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